This is a 6-inch diameter quartz tube furnace designed for heat treating substrates that do not significantly outgas or decompose. It is used mainly for annealing, sintering, alloying, firing substrates of up to 4-inch diameter. 8000 Watt furnace. Three zone (6", 12", 6") heating elements, independently controllable up to 1200 C. K-type thermocouple instrumentation. Allowable substrates are Si, GaAs, Al2O3, SiC, SiO2, and InP. Substrates may contain various metallizations. |