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Semifab CD-E2 Environmental Control System #C1232015 Slightly smaller than Semifab RAM-E units, CD-E Remote Air Modules ensure maximum process stability and controlled point-of-process environments that support photo-resist coat, develop stations and other process modules requiring stringent temperature and humidity control. CD-E units deliver up to 750 CFM of controlled airflow through one to four outlets, while sensors located in the production tool's enclosure provide signals for the CD-E control loop. Deep UV, Low K and ULSI production, at 0.25-micron line-widths and beyond are well within the performance sweet spot of Semifab CD-E Series Air Control Modules. Temperature Control Performance |
