Refurbished applied materials upper chamber 0021-01421

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Subject: Refurbished applied materials upper chamber 0021-01421
Refurbished Universal Upper Chamber. A coating applied by Applied Materials refurbishment division. M-DPS
This is an FSAA refurbished Upper Chamber Body. It has been remachined and had the A coating applied. It was originally a 0040-52662 but is now a Universal Upper Chamber Body designed to be used for 0040-52662, 0040-02544, 0021-01421, 0021-09601 or 0020-33802