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Information - Questions? Call Ask for Chip or Trip The ATS100 series motor-driven linear stages provide the high resolution and repeatability required for semiconductor wafer testing and fabrication, automated microscope inspection systems, and precision micromachining applications. The stages are setup in an X-Y-Z configuration. Each stage has the following specifications: * Total Travel: 100 mm (4 in) * Drive System: Precision Ground Ball Screw * Resolution: 2 mm/rev lead 0.5 µ m (20 µ in) @ 4000 steps/rev Motor Resolution * Maximum Travel Speed: 100 mm/s (4 in/s) * Horizontal: 25.0 kg (55.1 lb) * Vertical: 10.0 kg (22.0 lb) * HAL ±0.5 µm (±20 µin) * Standard ±3.0µm (±120 µin) * HAL: ± 0.3 µm (±12 µin) * Standard: ± 0.7 µm (±30 µin) * HAL: 1.0 µm/25 mm (40 µin/in) * Standard: 2.0 µm/25 mm (80 µin/in) * HAL ± 1.0 µm (±40 µin) * Standard ±2.0 µm (±80 µin) The X, Y, and Z stages have 101SMC2N-HM motor drives installed. Each stage assembly has an Aerotech HDZ1 English right angle L-bracket installed. This item is in excellent condition, working perfectly, and comes with a 14 Day Guarantee Against DOA. Our 14 Day Guarantee Against DOA (Dead On Arrival) does not guarantee compatibility. If something is listed AS-IS, there are absolutely no returns, refunds, or exchanges. Cashier's Check, Company Check, Money Order, and Personal Check Bank Wire - Contact for Information Bank Wire - Contact for Information |