Up
|
Information - Questions? Call Ask for Chip or Trip The LEP300 laser endpoint detector provides a real-time process control capability for a wide range of dry etch applications including semiconductors, optoelectronics, MEMS, failure analysis and general thin film removal. It offers in-situ monitoring solutions with excellent noise rejection and reduced set-up costs for both production and R&D environments. The system includes a user-friendly Windows-based environment for input, control and visualisation. It calculates the etch rate and etch depth in real time enabling enhanced control of process termination. The LEP300 enables dry etch users to decrease process development time and manufacturing costs and increase yield and product performance. This unit has the following features: * Dry etch process control and endpoint * Real-time,in-situ measurement * Integration to etch tool controller for automatic operation * Fast data acquisition with high noise rejection for accurate termination * User-friendly,Windows driven interface * Predictive modelling software, reducing material waste * Data reprocessing capability to speed up process optimisation * Remote control for thru-wall cleanroom implementation * Wavelength scanning for in-situ thickness measurement The LEP300 is a flexible product suitable for both R&D and volume manufacturing environments. It is also suitable across a wide range of materials and industries, including: * GaAs, AlGaAs, InGaAs, InGaAsP * metals…..and many more. * Optoelectronics: Lasers, LEDS, VCSELS * High Speed Electronics: T-gates, isolation etch * MEMS: Deep Si etch, waveguides, microchannels, cantilevers * Failure Analysis: Oxide, nitride, metal removal This unit has the following specifications: * Optical Head Wavelength: 670 nm * Vision System: Black and white monitor For additional information, click here. For a User's Manual, click here. For more photos of this unit, click here. New Unit Costs $35,643 from BOC Edwards This item is in excellent condition, working perfectly, and comes with a 14 Day Guarantee Against DOA. Our 14 Day Guarantee Against DOA (Dead On Arrival) does not guarantee compatibility. If something is listed AS-IS, there are absolutely no returns, refunds, or exchanges. Cashier's Check, Company Check, Money Order, and Personal Check Bank Wire - Contact for Information Bank Wire - Contact for Information |