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CPA V 2000 Inline Sputtering system. Multi area coating zones, This unit was in service at Stormedia in Santa Clara Ca for a number of years coating CO, Ni/Cr, C, Cr, Ta/Cr/Pt/Co. Continous feed. Nine Sections, 1 load, 1 Unload, 5 Target bays ( targets on 2 sides with a total of 22 target openings, 1 heat, 1 isolation. 3 Cyro Pumps, 2 turbo pumps, 4- Edwards 80 two stage mechanical pumps. Twenty AVE DC Power supplies. 1 Dycor quadrapole gas analyzer 1 MKS 147 multi gas controller 40 Targets and the assemblies to mount the targets. Pallet of high strength magnets. Two pallets(Gaylords-4'x4'x4') of Non magnetic Aluminum shrouding, various configrerations, toolbox 8 drawer 6x6', approx 1,000 feet of SO Cord- 5 wire+, extra parts and used targets. |
