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Two Vector 2200 Process Gas Panels One Onboard Three Valve Manual Purge Panel AP220St Touch Screen Controller This cabinet is compliant with SEMI S2 Current Standards for Silane. We provide full sales and service support for these cabinets and can also assist with installation and start up. This cabinet has undergone a full system test, purge and evaluation prior to sale and comes with a full 90 day warranty on parts and operational components. Contact us about availability of other cabinets. |