Up
|
FOR SALE ATOMIKA X-Ray Fluorescence Spectrometer Total reflection X-ray fluoresecence spectrometer is used as a method of analyzing surface cleanness of semiconductor wafers. It allows detection of metallic contaminants on wafer surfaces both qualitatively and quantitively. TXRF is good for surfaces due to the low penetration depth of the x-rays used, improving the signal to background noise ratio and hence the detection limits. Power: 220V phase to phase, power 7kVA, ,footprint 2200mm x 1200mm depth, height 1800mm, weight 550kg, minimum floor loading cpacity 1000 kg/m2. Generator: 20KHz transistor technique Tube voltage: From 1-60kV in steps of 1kV, accuracy +/- 2%, stability +/-0.01% at line fluctuation of 10%. Detector type: Si (Li) , 80 mm2 area, 168eV FWHM, resolution for 5.898 keV at 2000 Cts/sec input Amplifier: Stability: 0.01% per degrees C. Pulse air resolution is 250 nanoseconds above 2.5 keV and 1 microsecond below 2.5 keV Bias supply: HV output 400-1000 Volts in 100V steps. Protection -shuitdown of HV if detector warms up. A to D convertor: 4,096 addresses, 100 MHz clock, automated energy calibration. Data memory: 2048 data channels, 16 million counts/ channel. Gencobot IIFor more information and pictures on this machine follow the link below. For more information and pictures on this machine follow the link below. http://www.fabsurplus.com/equip_owned/2806.html |