Up
|
AccuThermo AW610 is a rapid thermal processor ( RTP) which uses Pentium computer as control system and new developed software to achieve higher precisely temperature control, more friendly user interface, easier diagnositc and maintainence compare with old type RTP system. Allwin21 Corp. has purchased exclusive manufacture license for AG610 RTP system, details please link to our website: http://www.allwin21.com/news1.asp The Advantage of AW610 RTP systems: * Integrated process control system * Real time graphics display， * Real time process data acquisition, display, and analysis, * Programmed comprehensive calibration and diagnostic functions. * Closed-loop temperature control with pyrometer or thermocouple temperature sensing. * Precise time-temperature profiles tailored to suit specific process requirement. * Fast heating and cooling rates unobtainable in conventional technologies. * Consistent wafer-to-wafer process cycle repeatability. * Elimination of external contamination. * Small footprint and energy efficiency. * Other heat treatment process AccuThermo AW610 Rapid Thermal Processor Comparison with old AG Heatpulse 610 System: Steady-state Temperature Range Temperature measuring precision Temperature control repeatability New advanced adaptive temperature control Not easy to edit with non-convenient data input It is easy to edit recipe with GUI and graph display Transfer data to server by EtherNet Turn off the Lamp controller when computer down Manually calibrated with adjusting variable resistor Software calibration and easy to be done Manual calibration with 8 to 12 points only It is difficulty to do calibration procedure Software calibration with nearly 500 points It is easy to do calibration procedure. More functions and I/O hardware “exposed for easier maintenance and trouble shooting No detecting and display in process Detect in process and with color curve displaying on the screen Physical Specification： Power supply：208V-240V 50/60Hz 100AMP Cooling water at 2 GPM (7.5LPM), 30-80 PSIG Cooling N2 or CDA at 10-15 SCFM (283-425 SLPM) Process Gas (N2, O2 or Formed Gas)：0-10 SLPM 18 W x 20 D x 10 H (46 cm W x 50 cm D x 25 cm H) Please visit www.allwin21.com or contact us by phone: AccuTherm is a registered trademark of Allwin21 Corp. |