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FOR SALE Canon LITHO/STEPPER DUV De-installed, barrier bagged, skidded and warehoused in Avezzano, Italy. Deinstalled By Canon engineers, and report of performance prior to deinstallation is attached. Lens is stored in a temperature controlled environment. Interface for TEL Mark 8 track 2-Compact Chamber 3-Beam Shaper unit Table+Bracket 4-"D" Rack 5-Illuminator 6-Chemical filter 7-Optical laser 8- Alignment scope 9-Chemical cabinet 10-Roof unit 11-Cymer laser 12-Booth 1 side panels 13-Booth 2 14-Accessory box 1 15-Accessory box 2 Deinstalled by Canon Europa BV. ILLUMINATION CONDITION with N.A. 0.6 sigma 0.65 ALIGNEMENT ACCURACY X=-0.033 3sigma=0.039 RETICLE ROTATION 0.071ppm For more information and pictures on this machine follow the link below. http://www.fabsurplus.com/equip_owned/11198.html Check my "about me" page for more information |