PROCELL SVG ASML 300mm Chill plate PN: 99-56703-01
This module includes the test checklist with with uniformity plots
This PROCELL SVG ASML 300mm Chill plate PN: 99-56703-01 was part of a spare parts kit for the Procell coater developer.
Guaranteed for 90 days after receipt
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SEMICONDUCTOR EQUIPMENT SPARES