Precision X-Y Positioning System removed from a semiconductor wafer stepper. The following components are included with this system:
1. Precision X-Y stage. This stage is compumotor driven with Heidenhain .1 micrometer scales.
2. CPU including resident software (DOS-UNIX based) with compumotor PC board and two compumotor S series motor drivers.
The following is the original stage specifications:
The specifications of the 6x6 X-Y stage are as follows:
Bi-Directional repeatability (1σ): ≤0.5 µm
Linear accuracy (3σ): 2 µm / inch
Straightness of travel: 5 m over travel
Flatness of travel: 5 µm over travel
Axis Settling time: ≤200 ms
Additional photographs are available.
* Cosmetic Condition: Good
* Operating Condition: Not Tested
* Sales Tax: California residents must pay state sale tax
* Warranties or Returns: No warranties are expressed or implied. Items that are supposed to be operational according to the listing can be returned if they are D.O.D. Items that are untested or are sold as-is cannot be returned.
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