Matrix 403 plasma poly/nitride etcher

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Subject: Matrix 403 plasma poly/nitride etcher
For Sale Matrix 403 Plasma Poly / Nitride Etcher
Wafer counter reads 162495 wafers, system timer 22707.1 hrs Manufacturing date 24th July 1998 200-240V 50/60Hz 1 phase Full load current 30A CE marked
0.2 Meter Verity Monochromator
Cybeq Model 2206 Cassette elevator for 3,4,5,6 inch wafers.
Brooks model 000-6100-90-B Robot with ceramic robot blade.
Tylan General CMLB-11M Baratron
RF Services Model 9900-003-01 s/n 9310-0634 700 Mini Match, Last calibrated on 09/11/00 EPROMS version V5.3FX1 MFC configuration:
Gas 1 Tylan FC 280 SAV N2 200 sccm
Gas 2 Tylan FC 2900V N2 100 sccm
Gas 3 Tylan FC 280 SAV N2 100 sccm
Gases run - Gas 1 NF3, Gas 2 O2, Gas 3 He Isolation valve is included with the tool Chiller model FC 1200T Julabo Labtecnik GmbH, D77960 Seebach, Germany 230V, 2.3 kW, 50Hz, 10A Refrigerant R134A , fill weight 0.45 kg 10 bar max. op. press.
Dimensions 64 cm x 47 cm x 53 cm.
Machine dimensions uncrated 133cm x 87cm x 135 cm Crated (estimate) 153 cm x 107 cm x 155 cm.
Wafer counter reads 283675 wafers, system timer 29494.4 hrs Manufacturing date Nov 1997 200-240V 50/60Hz 1 phase Full load current 30A CE marked
0.2 Meter Verity Monochromator dated 6/95 ENI OEM6XL RF Generator Cybeq Model 2206 Cassette elevator for 3,4,5,6 inch wafers.
Brooks model 000-6100-90-B Robot with ceramic robot blade.
Tylan General CMLB-11M Baratron
RF Services Model 9900-003-11 s/n 9402-0843 700 Mini Match, Last calibrated on 29/08/00 EPROMS version V5.3FX1 MFC configuration:
Gas 1 Millipore FC2900 4V N2 200 sccm
Gas 2 Millipore FC2900 4V N2 100 sccm
Gas 3 Millipore FC2900M N2 100 sccm
Gases run - Gas 1 NF3, Gas 2 O2, Gas 3 He Isolation valve is included with the tool.
Isolation valve Tylan MDVX-015 s/n 95046301 Throttle valve Norcal 0995-16528 Dimensions 64 cm x 47 cm x 53 cm.
Machine dimensions uncrated 133cm x 87cm x 135 cm Crated (estimate) 153 cm x 107 cm x 155 cm.
For more information and pictures on this machine follow the link below.
http://www.fabsurplus.com/equip_owned/2757.html
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