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Chamber size: 1104 mm diameters Chamber height: 110” in height. Surface area occupation: 70 square feet. Compressed air pressure: 90 psi Dome substrate fixture with 4 quarters sectional dome ficture Size changeable sectional substrate fixture. Film uniformity adjustment mask(s) Two E-beam guns. With both X and Y directions independent sweeping One advanced Leybold Plasma source. – APS. Two-stage Leybold mechanical pump One 36” Leybold diffusion pump. Inductive heating system on roof of chamber behind dome substrate fixture. One Polycold (Polycold RHC-1100) Leybold Inficon xtal thin film growth monitoring system Comes with OMS 3000 optical monitoring system (not installed) Three gas lines: Ar, O2 and N2. |
