LAM Alliance 9100 RF Match Chamber Inventory #868 LAM Research 853-460898-001-A-233 This RF Match Chamber was pulled from a working LAM Alliance 9100 and is in good, operable condition. The unit has a few scratches. SEMICONDUCTOR EQUIPMENT SPARES Monday - Friday 8:30 AM - 5:00 PM Mountain Standard Time Closed Saturday, Sunday and all major US holidays. SEMICONDUCTOR EQUIPMENT SPARES |