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| Manufacturer: Speedfam - IPEC Model: 676 Serial number: 676-3035 Wafer size: 200mm Condition: Very Good Genmark Robot & controller Multiple wafer polishing modules with quick-change carriers and polish pads Through-the-pad multiple chemical delivery for point of use slurry mixing Advanced graphical user interface with flexible recipe management system Closed loop wafer polish pressure control and independent head rotational control Endpoint detection capability |