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GENUS Vacuum Chamber Load-Lock Wafer Handler Mechanism. We believe this unit is from a GENUS deposition system. The factory website link follows. There looks to be a horizontal linear drive mechanism in the long portion of the chamber that extends to the right in the image below. The tall tape and cardboard area to the right above and left below is what we think is a a wafer transfer port slot. The image below is looking down in the top of the section to the left in the image above. There are a pair of fingers that appear to be for flipping a wafer from horizontal to vertical. Dimensions are as shown in these images. Overall is about 41" by 13 by 24. Similar items may be available listed separately or on request. Might be just what you need for your vacuum chamber mechanical transport application. Condition looks very good used removed from cleanroom equipment. Sold as-is-where-is. What you see is what you get. We are in the Desert Southwest so items may need dusting/cleaning when they arrive. Click cavlon99 all to see items from the past 30 days-might be something you need that did not sell. Click here to check for last minute updates and cavlon99 news. This item may be subject to government export/import restrictions. Click the following link for rules regarding sale/resale of US government property Sale of Government Property. |