Eni rf generator dpg-10 frequency range 90 to 460 khz

Subject: Eni rf generator dpg-10 frequency range 90 to 460 khz

ENI RF Generator DPG-10-01 Frequency Range 90 to 460 kHz
· Frequency range: 90-460 kHz
· RF output impedance: 50-600 ohms
· Power leveling: forward or load (plasma)
· AC power line: 115 VAC ±8%, 20 A, 50-60 Hz
· Plasma matching: built-in variable 7-position step transformer for plasma impedances between 50 and 600 ohms.
· Mismatch protection: up to 200w before shutdown
· Control interface: type D, 9-pin connector
· RF output connector: Type C
This ENI RF Generator DPG-10-01 Frequency Range 90 to 460 kHz is refurbished surplus, in good working & physical condition. Includes DPGS/DPGD Final Test Sheet.
Guaranteed for 60 days after receipt
Monday - Friday 8:30 AM - 5:00 PM Mountain Standard Time
Closed Saturday, Sunday and all major US holidays.
SEMICONDUCTOR EQUIPMENT SPARES