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Ultimate Pressure: 0.27/0.40 Pa Pumping Speed: 3600/3000 l/min Power Supply: 3 Phase, 200-220V/200V, 60/50 Hz Water Flow Rate: Greater than 3.5L/min Seting Pressure: 0.04-0.07 MPa Nitrogen Flow Rate: 17-22 Pa m^3/s This pump is suitable for Applied Materials Endura System. |