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Description for CPA 24” Vertical Inline Sputtering System My Note: The unit was in service at Store Media in Santa Clara Ca for a number of years. It was 1 of 16 systems that sputtered Ni/Cr,C,Cr,Ta/Cr/Pt/Co. The maximum part that could be coated is 24"x16"x125. The machine is complete. Should hook up, test/upgrade/repair with a possible vendor just 5 miles down the road (5) Target (targets on two sides with total of 22 target bays)(1) heat (2) Leybold 8 inch turbo pumps Five Grenville Phillips 303 vacuum process controllers One Dycor quadrapole gas analyszer One MKS 147 multi gas controller 40 plus spare targets and assemblies Extra shielding and many spare parts. |
