FOR SALE Canon LITHO/STEPPER DUV
De-installed, barrier bagged, skidded and warehoused in Avezzano, Italy.
Deinstalled By Canon engineers, and report of performance prior to deinstallation is attached.
Lens is stored in a temperature controlled environment.
Interface for TEL Mark 8 track
2-Compact Chamber 3-Beam Shaper unit Table+Bracket
4-"D" Rack 5-Illuminator 6-Chemical filter
7-Optical laser 8- Alignment scope 9-Chemical cabinet
10-Roof unit 11-Cymer laser 12-Booth 1 side panels
13-Booth 2 14-Accessory box 1 15-Accessory box 2
Deinstalled by Canon Europa BV.
ILLUMINATION CONDITION with N.A. 0.6 sigma 0.65
ALIGNEMENT ACCURACY X=-0.033 3sigma=0.039
RETICLE ROTATION 0.071ppm
For more information and pictures on this machine follow the link below.
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