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Align & Expose Process wafer handler 6in. type 2/reticle size 5in. type 2 CTC Temp: Lens: 22.5Deg.C-Booth: 21.0Deg.C-Stage: Deg. 23.0C Features: 20mm-square projection screen size NA (numerical aperture)-0.52 Resolution exposure-0.5 micron Manuals: Operation-Maintenance-Parts catalogue are available. Major retrofit history: N/A Main body plus reticle changer and illuminator HP Color monitor keyboard and printer For more information and pictures on this machine follow the link below. http://www.fabsurplus.com/equip_owned/1211.html |