Fully Refurbished, new upgraded AG Associates Heatpulse AG610
* Closed-loop temperature control with pyrometer or thermocouple temperature sensing.
* Precise time-temperature profiles tailored to suit specific process requirement.
* Fast heating and cooling rates unobtainable in conventional technologies.
* Consistent wafer-to-wafer process cycle repeatability.
* Elimination of external contamination.
* Small footprint and energy efficiency.
* Other heat treatment process
Comparisons between new upgraded system and old system
Steady-state Temperature Range
Temperature measuring precision
Temperature control repeatability
New advanced adaptive temperature control
Not easy to edit with non-convenient data input
It is easy to edit recipe with GUI and graph display
Transfer data to server by EtherNet
Turn off the Lamp controller when computer down
Manually calibrated with adjusting variable resistor
Software calibration and easy to be done
Manual calibration with 8 to 12 points only
It is difficulty to do calibration procedure
Software calibration with nearly 500 points
It is easy to do calibration procedure.
More functions and I/O hardware “exposed” for easier maintenance and trouble shooting
No detecting and display in process
Detect in process and with color curve displaying on the screen
Power supply：208V-240V 50/60Hz 100AMP
Cooling water at 2 GPM (7.5LPM), 30-80 PSIG
Cooling N2 or CDA at 10-15 SCFM (283-425 SLPM)
Process Gas (N2, O2 or Formed Gas)：0-10 SLPM
18” W x 20” D x 10” H (46 cm W x 50 cm D x 25 cm H)
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